P600 R&D MBE system
The P600 MBE R&D version is a versatile research MBE system with 12 ports for effusion cells or other sources.
The P600 can be equipped with a manually operated linear wafer transfer system or a fully automatic circular central distribution chamber (CDC) transfer system.
The P600 growth chamber has a removable source flange. This allows splitting the chamber in to two parts for thorough cleaning of the cryo panels from deposits. The growth chamber has a very extensive cryo panelling with large volume and surface area. This makes it possible to switch quickly from arsenide to phosphide during growth.
Classify：
Semiconductor
Functional Overview
The P600 MBE R&D version is a versatile research MBE system with 12 ports for effusion cells or other sources.
The P600 can be equipped with a manually operated linear wafer transfer system or a fully automatic circular central distribution chamber (CDC) transfer system.
The P600 growth chamber has a removable source flange. This allows splitting the chamber in to two parts for thorough cleaning of the cryo panels from deposits. The growth chamber has a very extensive cryo panelling with large volume and surface area. This makes it possible to switch quickly from arsenide to phosphide during growth.
Features:
Removable source flange and two part cryo panel
Can be delivered with two sets of cryo panels
Cryo panels can be exchanged in one working day
Designed for GaAs, GaSb, InP, CdTe, HgCdTe, ZnO and GaN epitaxy
4”, 3” or 2” substrate manipulator
Related videos
Related downloads
Contact us
Tel：
Fax：
010-84195225
E-mail：
Address：
Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing
Headquarters of Harvest Electronic Technology Co., Ltd in Beijing