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IMC200 - Standard & Research Medium Current Ion Implanter
Functional Overview
Technical indicators
Installation conditions
• 200 kV model
• up to 400 kV double charge
• Multiple ion sources
• Manual or automatic loading
• Large range of implantations
• 60+ species available (Te, Yb, Al…)
• GaAs,SiC, InSb, HgCdTe, LiNbO3…
• Wide process window
• +600°C, -100°C
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