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IMC200 - Standard & Research Medium Current Ion Implanter

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IMC200 - Standard & Research Medium Current Ion Implanter

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Functional Overview
Technical indicators
Installation conditions
•     200 kV model
•      up to 400 kV double charge
•     Multiple ion sources
•     Manual or automatic loading
•     Large range of implantations
•     60+ species available (Te, Yb, Al…)
•     GaAs,SiC, InSb, HgCdTe, LiNbO3…
•     Wide process window
•     +600°C, -100°C
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•     200 kV model
•      up to 400 kV double charge
•     Multiple ion sources
•     Manual or automatic loading
•     Large range of implantations
•     60+ species available (Te, Yb, Al…)
•     GaAs,SiC, InSb, HgCdTe, LiNbO3…
•     Wide process window
•     +600°C, -100°C
暂未实现,敬请期待
暂未实现,敬请期待
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