IMC200 - Standard & Research Medium Current Ion Implanter

• 200 kV model • up to 400 kV double charge • Multiple ion sources • Manual or automatic loading • Large range of implantations • 60+ species available (Te, Yb, Al…) • GaAs,SiC, InSb, HgCdTe, LiNbO3… • Wide process window • +600°C, -100°C

Classify：

Semiconductor

Functional Overview

• 200 kV model

• up to 400 kV double charge

• Multiple ion sources

• Manual or automatic loading

• Large range of implantations

• 60+ species available (Te, Yb, Al…)

• GaAs,SiC, InSb, HgCdTe, LiNbO3…

• Wide process window

• +600°C, -100°C