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FLEXion 200/400 - High Performance Medium Current Ion Implanter

Functional Overview

Technical indicators

Installation conditions

• 200 kV or 400 kV model

up to 800kV double charge

up to 1.2MeV triple charge

• IHC ion source

High beam performance

Improved multicharging

• Extended species capacity

4x 2,2L dopant cylinders

4x neutral auxiliary lines

• Up to 218 AMU

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Phone:

Fax:

010-84195225

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Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing