FLEXion 200/400 - High Performance Medium Current Ion Implanter
• 200 kV or 400 kV model
up to 800kV double charge
up to 1.2MeV triple charge
• IHC ion source
High beam performance
Improved multicharging
• Extended species capacity
4x 2,2L dopant cylinders
4x neutral auxiliary lines
• Up to 218 AMU
Classify:
Semiconductor
Functional Overview
• 200 kV or 400 kV model
up to 800kV double charge
up to 1.2MeV triple charge
• IHC ion source
High beam performance
Improved multicharging
• Extended species capacity
4x 2,2L dopant cylinders
4x neutral auxiliary lines
• Up to 218 AMU
Contact us
Tel:
Fax:
010-84195225
E-mail:
Address:
Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing