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FLEXion 200/400 - High Performance Medium Current Ion Implanter

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FLEXion 200/400 - High Performance Medium Current Ion Implanter

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Functional Overview
Technical indicators
Installation conditions
•     200 kV or 400 kV model
    up to 800kV double charge
    up to 1.2MeV triple charge
•     IHC ion source
    High beam performance
     Improved multicharging
•     Extended species capacity
    4x 2,2L dopant cylinders
    4x neutral auxiliary lines
•     Up to 218 AMU
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•     200 kV or 400 kV model
    up to 800kV double charge
    up to 1.2MeV triple charge
•     IHC ion source
    High beam performance
     Improved multicharging
•     Extended species capacity
    4x 2,2L dopant cylinders
    4x neutral auxiliary lines
•     Up to 218 AMU
暂未实现,敬请期待
暂未实现,敬请期待
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