FLEXion 200/400 - High Performance Medium Current Ion Implanter
• 200 kV or 400 kV model
up to 800kV double charge
up to 1.2MeV triple charge
• IHC ion source
High beam performance
Improved multicharging
• Extended species capacity
4x 2,2L dopant cylinders
4x neutral auxiliary lines
• Up to 218 AMU
Classify：
Semiconductor
Functional Overview
• 200 kV or 400 kV model
up to 800kV double charge
up to 1.2MeV triple charge
• IHC ion source
High beam performance
Improved multicharging
• Extended species capacity
4x 2,2L dopant cylinders
4x neutral auxiliary lines
• Up to 218 AMU
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