全部
  • 全部
  • 产品管理
  • 新闻资讯
  • 介绍内容
  • 企业网点
  • 常见问题
  • 企业视频
  • 企业图册
+
  • 6(2).png

FLEXion 200/400 - High Performance Medium Current Ion Implanter

•     200 kV or 400 kV model     up to 800kV double charge     up to 1.2MeV triple charge •     IHC ion source     High beam performance      Improved multicharging •     Extended species capacity     4x 2,2L dopant cylinders     4x neutral auxiliary lines •     Up to 218 AMU

Classify:

Semiconductor

Functional Overview

•     200 kV or 400 kV model
    up to 800kV double charge
    up to 1.2MeV triple charge
•     IHC ion source
    High beam performance
     Improved multicharging
•     Extended species capacity
    4x 2,2L dopant cylinders
    4x neutral auxiliary lines
•     Up to 218 AMU

Related videos


Related downloads

Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing