Automatic Wafer Sorter

· 200mm and 300mm wafer handling

· Wafer transfer, sorting, split, merge, invert, randomized, compress wafer-lots, packing / unpacking, etc.

· Wafer Carriers: FOUP / FOSB, SMIF Pod, 8-inch wafer with adapter in FOUP, Coin Stacked Box and custom-made wafer carriers.

· Wafer carrier identification (RFID tag / barcode label)

· 13 & 25 slots cassette capability

· SMART wafer map and wafer cross slot detection

· Bernoulli thin wafer handling capability

· User-friendly windows interface

· Wafer backside / edge inspection

· SEMI, CE compliant

· SECS / GEM compliance