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Automatic Wafer Sorter
Functional Overview
Technical indicators
Installation conditions
· 200mm and 300mm wafer handling
· Wafer transfer, sorting, split, merge, invert, randomized, compress wafer-lots, packing / unpacking, etc.
· Wafer Carriers: FOUP / FOSB, SMIF Pod, 8-inch wafer with adapter in FOUP, Coin Stacked Box and custom-made wafer carriers.
· Wafer carrier identification (RFID tag / barcode label)
· 13 & 25 slots cassette capability
· SMART wafer map and wafer cross slot detection
· Bernoulli thin wafer handling capability
· User-friendly windows interface
· Wafer backside / edge inspection
· SEMI, CE compliant
· SECS / GEM compliance
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