High-end products in semiconductors like WAFER, MEMS and MRAM. Product range started with manual wet stations for R&D, semi-automated systems and up to fully automated tools for the chemical surface treatment like cleaning, etching and drying. *Manual Wet Process Stations *Semi- and Fully Automated Wet Process Stations *Quartztube- and Part-Cleaning Stations *Total Metal Free Working Stations *Special Customer Specified Units *Chemical Supply Systems (pump or pressure systems)