全部
  • 全部
  • 产品管理
  • 新闻资讯
  • 介绍内容
  • 企业网点
  • 常见问题
  • 企业视频
  • 企业图册
+
  • 15.png

TUBESTAR R&D Furnace Platform

•     Batch type Tube Furnace Diffusion, •     Diffusion, LPCVD and Oxidation •     1 to 4 Independent Tubes •     50 wafers per tube •     Ideal for Process Engineering •     Tiny Footprint •     Manual Loading

Classify:

Semiconductor

Functional Overview

•     Batch type Tube Furnace Diffusion,
•     Diffusion, LPCVD and Oxidation 
•     1 to 4 Independent Tubes
•     50 wafers per tube
•      Ideal for Process Engineering 
•     Tiny Footprint
•     Manual Loading 
 

Related videos


Related downloads

Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing