Online customer service

Customer service hotline

Customer service team:

在线客服

Service time:

TUBESTAR R&D Furnace Platform

Functional Overview

Technical indicators

Installation conditions

• Batch type Tube Furnace Diffusion,

• Diffusion, LPCVD and Oxidation

• 1 to 4 Independent Tubes

• 50 wafers per tube

• Ideal for Process Engineering

• Tiny Footprint

• Manual Loading

双击上传视频

Contact us

Phone:

Fax:

010-84195225

E-mail:

Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing