HTR-SERIES Production Furnace
• Batch type Tube Furnace
• Diffusion, LPCVD and Oxidation 4
• Independent Tubes
• 200 wafers per tube
• Compatible up to 200mm
• Best in-class Uniformity
• Automatic Loading
Classify：
Semiconductor
Functional Overview
• Batch type Tube Furnace
• Diffusion, LPCVD and Oxidation 4
• Independent Tubes
• 200 wafers per tube
• Compatible up to 200mm
• Best in-class Uniformity
• Automatic Loading
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Contact us
Tel：
Fax：
010-84195225
E-mail：
Address：
Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing
Headquarters of Harvest Electronic Technology Co., Ltd in Beijing