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HTR-SERIES Production Furnace

Functional Overview

Technical indicators

Installation conditions

• Batch type Tube Furnace

• Diffusion, LPCVD and Oxidation 4

• Independent Tubes

• 200 wafers per tube

• Compatible up to 200mm

• Best in-class Uniformity

• Automatic Loading

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Contact us

Phone:

Fax:

010-84195225

E-mail:

Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing