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HTR-SERIES Production Furnace

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HTR-SERIES Production Furnace

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Functional Overview
Technical indicators
Installation conditions
•     Batch type Tube Furnace 
•     Diffusion, LPCVD and Oxidation 4
•     Independent Tubes
•     200 wafers per tube 
•     Compatible up to 200mm 
•     Best in-class Uniformity
•     Automatic Loading 
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•     Batch type Tube Furnace 
•     Diffusion, LPCVD and Oxidation 4
•     Independent Tubes
•     200 wafers per tube 
•     Compatible up to 200mm 
•     Best in-class Uniformity
•     Automatic Loading 
暂未实现,敬请期待
暂未实现,敬请期待
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Contact us
Phone:
Fax:
010-84195225
E-mail:
Address:
Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing