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HTR-SERIES Production Furnace

• Batch type Tube Furnace • Diffusion, LPCVD and Oxidation 4 • Independent Tubes • 200 wafers per tube • Compatible up to 200mm • Best in-class Uniformity • Automatic Loading

Classify:

Semiconductor

Functional Overview

•     Batch type Tube Furnace 
•     Diffusion, LPCVD and Oxidation 4
•     Independent Tubes
•     200 wafers per tube 
•     Compatible up to 200mm 
•     Best in-class Uniformity
•     Automatic Loading 

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Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing