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MEMSLAB PECVD R&D Platform

•     Direct Plasma, Low RF •     Pin Mark Free, Color Uniform •     Horizontal Wafer Process •     Up to 25 wafers per batch •     Compatible up to 200mm •     In-situ Cleaning •     SiN, SiON, a:Si, SiC, SiCxNy

Classify:

Semiconductor

Functional Overview

•     Direct Plasma, Low RF
•     Pin Mark Free, Color Uniform 
•     Horizontal Wafer Process 
•     Up to 25 wafers per batch
•     Compatible up to 200mm 
•     In-situ Cleaning
•     SiN, SiON, a:Si, SiC, SiCxNy 

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Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing