全部
  • 全部
  • 产品管理
  • 新闻资讯
  • 介绍内容
  • 企业网点
  • 常见问题
  • 企业视频
  • 企业图册
+
  • 18.png

OTFC series system

OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.   •     Chamber size: φ 600mm-φ1800mm •     60-point optical thickness monitor. •     RF ion source achieving uniformed, larger ion beam distribution over a larger area at high ion current density. •     Over 100 layers can be deposited by 2 EB guns and multi-point crucible hearth or annular hearth. •     Auto-deposition control system for fully automated process. •     Center-driving or planetary substrate dome is selectable. •     Diffusion pumps plus Polycold or Cryo- pumps.

Classify:

Semiconductor

Functional Overview

OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
 
•     Chamber size: φ 600mm-φ1800mm
•     60-point optical thickness monitor.
•     RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
•     Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
•     Auto-deposition control system for fully automated process.
•     Center-driving or planetary substrate dome is selectable.
•     Diffusion pumps plus Polycold or Cryo- pumps.
 

Related videos


Related downloads

Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing