OTFC series system
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
• Chamber size: φ 600mm-φ1800mm
• 60-point optical thickness monitor.
• RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
• Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
• Auto-deposition control system for fully automated process.
• Center-driving or planetary substrate dome is selectable.
• Diffusion pumps plus Polycold or Cryo- pumps.
Classify:
Semiconductor
Functional Overview
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
• Chamber size: φ 600mm-φ1800mm
• 60-point optical thickness monitor.
• RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
• Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
• Auto-deposition control system for fully automated process.
• Center-driving or planetary substrate dome is selectable.
• Diffusion pumps plus Polycold or Cryo- pumps.
Contact us
Tel:
Fax:
010-84195225
E-mail:
Address:
Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing