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OTFC series system
Functional Overview
Technical indicators
Installation conditions
OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
• Chamber size: φ 600mm-φ1800mm
• 60-point optical thickness monitor.
• RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
• Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
• Auto-deposition control system for fully automated process.
• Center-driving or planetary substrate dome is selectable.
• Diffusion pumps plus Polycold or Cryo- pumps.
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