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OTFC series system

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Functional Overview
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OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
 
•     Chamber size: φ 600mm-φ1800mm
•     60-point optical thickness monitor.
•     RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
•     Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
•     Auto-deposition control system for fully automated process.
•     Center-driving or planetary substrate dome is selectable.
•     Diffusion pumps plus Polycold or Cryo- pumps.
 
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OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.
 
•     Chamber size: φ 600mm-φ1800mm
•     60-point optical thickness monitor.
•     RF ion source achieving uniformed, larger ion beam distribution
over a larger area at high ion current density.
•     Over 100 layers can be deposited by 2 EB guns and multi-point
crucible hearth or annular hearth.
•     Auto-deposition control system for fully automated process.
•     Center-driving or planetary substrate dome is selectable.
•     Diffusion pumps plus Polycold or Cryo- pumps.
 
暂未实现,敬请期待
暂未实现,敬请期待
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