OTFC series system

OTFC series, based on the ion-assisted technology, are the most suitable coating system for producing AR coatings and optical filters such as edge filters, band pass filters etc.

 

•     Chamber size: φ 600mm-φ1800mm

•     60-point optical thickness monitor.

•     RF ion source achieving uniformed, larger ion beam distribution

over a larger area at high ion current density.

•     Over 100 layers can be deposited by 2 EB guns and multi-point

crucible hearth or annular hearth.

•     Auto-deposition control system for fully automated process.

•     Center-driving or planetary substrate dome is selectable.

•     Diffusion pumps plus Polycold or Cryo- pumps.