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Gener series system Suitable for mass production of AR coating

Excellent uniformity by the center drive substrate rotation system. Shortened coating tact time achieved by higher performance in pumping and heating. Optical monitor, DC ion source, and Resistance heater evaporation source can be optionally installed.

Classify:

Semiconductor

Functional Overview

Excellent uniformity by the center drive substrate rotation system.
Shortened coating tact time achieved by higher performance in pumping and heating.
Optical monitor, DC ion source, and Resistance heater evaporation source can be optionally installed.

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Contact us

Tel:

010-84195588 、010-84195151


Fax:
010-84195225

 

E-mail:

market@harvest.net.cn


Address:

Room 508-510, Building C, Yonghe Mansion, No.28, Andingmen East Street, Dongcheng District, Beijing